Microwave generated plasma light source apparatus

ABSTRACT

A microwave generated plasma light source including a microwave generator, a microwave cavity having a light reflecting member forming at least a portion of the cavity, and a member transparent to light and opaque to microwaves disposed across an opening of the cavity opposite the feeding opening through which the microwave generator is coupled. An electrodeless discharge bulb is disposed at a position in the cavity such that the cavity operates as a resonant cavity at least when the bulb is emitting light. In the bulb is encapsulated at least one discharge light emissive substance. The bulb has a shape and is sufficiently small that the bulb acts substantially as a point light source.

This application .Iadd.is a reissue of U.S. Pat. No. 4,498,029, which.Iaddend.is a continuation of application Ser. No. 242,075, filed3/9/81, now abandoned.

BACKGROUND OF THE INVENTION

The present invention relates to a light source utilizing a microwavegenerated plasma discharge.

Recently, a light source utilizing high frequency discharge,particularly, a microwave generated plasma discharge, has beenconsidered in view of the long life thereby provided, which issignificantly longer than the life of a conventional light source havingelectrodes which are relatively easily consumed.

A light source using high frequency discharge has essentially noelectrode and thus there is no thermal loss such as is inherent to alight source having electrodes. Further, the discharge impedance thereofat the time when discharge starts is not significantly different fromthat during the stable discharge. In addition to these advantages, sincedischarge power is localized around an envelope of the lamp bulb, it iseasy to couple power to the light source at the discharge starting time.Thus, the time required to achieve the maximum lamp output is short.

FIG. 1 shows, in vertical cross section, a conventional microwavegenerated plasma light source constructed by incorporating the abovefeatures and FIG. 2 is a cross section of the light source taken along aline II--II in FIG. 1.

In these Figures, a magnetron 1 enclosed by an envelope 10 and cooled bya cooling fan 7 generates microwave energy which is radiated through amagnetron antenna 2 into a waveguide tube 3. The microwave energypropagates along the waveguide tube 3 and is radiated through a feedingopening 5 to a cavity 49 having a semicircular cross section and definedby a mesh 9 and a semicircular light reflector 4 having a plurality ofgas passages formed therein to thus establish a microwaveelectromagnetic field therein. A discharge occurs in a noble gasencapsulated in a discharge bulb 6 due to the microwave electromagneticfield to thus heat the bulb wall or envelope and to thereby evaporate ametal such as mercury also encapsulated in the bulb. Then, discharge inthe gaseous metal takes place. With this gaseous metal discharge, themicrowave energy is caused to be absorbed by the discharge bulb 6substantially completely during its propagation along the length of thedischarge bulb 6 through several reflections within the cavity 49 sothat the microwave energy is converted into discharge energysubstantially completely. That is, the bulb is excited in anon-resonance state.

The reflector 4 defining a portion of the cavity 49 reflects lightdirected rearwardly of the lamp bulb so that all the light from the bulbis directed to pass through an open end of the cavity which is coveredby a mesh member 9 which is transparent to light but only translucent tomicrowaves to thereby utilize the light produced by the gaseous metaldischarge effectively.

Cooling air supplied by the fan 7, after cooling of the magnetron 1,passes through the air passages 8 of the reflector 4 to cool thedischarge bulb 6 and is discharged from the cavity 49 through the meshmember 9.

In the conventional microwave generated plasma light source constructedas above, the microwave electromagnetic waves are distributed in thecavity 49 having a semicircular cross section as shown in FIG. 3.However, the distribution is not uniform. Therefore, the discharge inthe discharge bulb 6 is not uniform and thus the light intensitydistribution is not uniform in the axial direction of the bulb.

One approach of eliminating the non-uniformity of light intensitydistribution is to alter the shape of, for example, the reflector 4.This approach, however, is not practical because it is difficult as apractical matter to provide a reflector of a shape corresponding to themicrowave electric field distribution in the cavity. Another approach isto use as small a discharge bulb as possible to thereby obtain a uniformdischarge. Since, in this case, however, the cavity 49 is used in thenon-resonance state, it is impossible to supply sufficient power to thedischarge bulb 6 to excite it resulting in a low discharge efficiency.Therefore, the device thus constructed is not suitable for use as anultraviolet ray source for photographic plate making where a high lightintensity and a highly uniform illumination distribution over an area tobe illuminated are required.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a microwave generatedplasma light source apparatus with which a uniform illuminationdistribution is provided and which is suitable for use as an ultravioletray source, for example for a photographic plate making device.

The above object is achieved by the present invention by the use of amicrowave cavity as a resonator when the discharge bulb is operated andby selecting the shape of the discharge bulb so that it functions as apoint light source.

More specifically, the above and other objects of the invention are metby a microwave generated plasma light source apparatus including amicrowave generator, a microwave cavity having a light reflecting memberforming at least a portion of the cavity with the microwave generatorbeing coupled through a feeding opening in the cavity to the cavity, amember transparent to light and opaque to microwaves disposed across anopening of the cavity opposite the feeding opening, a waveguide forguiding microwaves generated by the microwave generator to the feedingopening of the cavity, and a non-electrode discharge bulb disposed at aposition in the cavity such that the cavity operates as a resonantcavity at least when the bulb is emitting light. The bulb encapsulatesat least one discharge light emissive substance and has a shape and issufficiently small that the bulb functions substantially as a pointlight source, taking into consideration the size and shape of the lightreflecting member.

Preferably, the light reflecting member is a light reflecting shellhaving rotational symmetry. At least a portion of the light reflectingshell may conform to the shape of the bulb and a wing portion may beprovided extending from a peripheral edge of the shell and an innersurface of the wing portion is made non-reflective to light. A lens maybe provided for collecting or scattering light passing through themember which is transparent to light and opaque to microwaves. Anelectrically conductive discharge start assisting member may be disposedat least in the vicinity of the bulb for concentrating a magnetic fieldwith the start assisting member in one preferred embodiment beingencapsulated in the bulb. The start assisting member is preferablydisposed on a side of the bulb facing the feeding opening. The dischargestart assisting member may have the shape of a wire or may be anelectrically conductive member having a dielectric covering therearound.A space may be provided between the conductive member and the dielectriccover which is at a reduced pressure.

The light reflecting member may be formed with a pair of opposed cut-offsleeves into which a pair of supporting members of the bulb are insertedto support the bulb. The bulb may have the supporting members formedintegrally therewith.

Preferably, the discharge light emissive substance encapsulated in thebulb is mercury of 7×10⁻⁶ gram atom/cc to 60×10⁻⁶ gram atom/cc, galliumof at least 1×10⁻⁷ gram atom/cc and a halogen of 1.5×10⁻⁷ to 50×10⁻⁷gram atom/cc. The bulb may be made of transparent quartz glass andshould have an inner diameter such that a ratio of an outer surface areaof the bulb to input microwave power is in a range of 1.5 to 15 mm² /W.The weight of the discharge bulb with respect to the microwave inputpower should be no more than 3.0×10⁻² g/W. The microwaves generator maygenerate the microwave intermittently in which case the rest intervalshould be no more than 5 msec. The microwave generator may be amagnetron with a full-wave voltage doubler power supply used to drivethe magnetron. The length of the waveguide should be selected such thatthe operation of the magnetron is within a phase width of a quarterwavelength with respect to a sink region of the magnetron immediatelyafter the bulb is ignited.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross section of the conventional microwave discharge lightsource;

FIG. 2 is a cross section of the microwave discharge light source takenalong a line II--II in FIG. 1;

FIG. 3 shows a microwave electric field distribution in a cavity of theconventional microwave discharge light source;

FIG. 4 is a cross sectional view of a preferred embodiment of thepresent invention;

FIG. 5 is a cross section of the present microwave discharge lightsource taken along a line V--V in FIG. 4;

FIG. 6 is a perspective view of a modification of the cavity portion ofthe embodiment in FIG. 4;

FIG. 7 is a cross section of a cavity of a second embodiment of thepresent invention;

FIG. 8 is a cross section of a modification of the cavity of the secondembodiment of the present invention;

FIGS. 9 through 11 show a third embodiment of the present invention inwhich FIG. 9 is a cross section thereof, FIG. 10 is a cross section ofthe cavity portion thereof and FIG. 11 is an enlarged view of anessential portion thereof;

FIGS. 12 through 14 show modifications of the discharge bulb of thethird embodiment of the present invention, respectively;

FIG. 15 is similar to FIG. 11, showing a modification of the thirdembodiment of the present invention;

FIGS. 16 through 18 are graphs showing characteristic curves which areplots of the relative light output of a non-electrode, sphericaldischarge bulb 4 according to a fourth embodiment of the presentinvention;

FIG. 19 is a graph showing a relation of the weight of the non-electrodespherical discharge bulb of the fourth embodiment to a light amountstabilizing time at the start of discharge;

FIGS. 20 and 21 show a fifth embodiment of the present invention inwhich FIG. 20 is a circuit diagram of a power source of the microwavegenerator and FIG. 21 shows a microwave waveform generated by themicrowave generator in FIG. 20; and

FIGS. 22 and 23 show a sixth embodiment of the present invention inwhich FIG. 22 is an example of the Rieke disgram of a magnetron and FIG.23 is a graph showing the impedance shift of the cavity thereof.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention will be described in detail with reference topreferred embodiments thereof.

Describing a first embodiment with reference to FIGS. 4 and 5, the firstembodiment includes a magnetron 1 equipped with a magnetron antenna 2, awaveguide 3 having one end connected to the magnetron 1 and the otherend connected to a microwave feeding opening 5 formed in a wall of alight reflecting member 4 which is formed as a shell in the shape of arotationally symmetrical cup or dome, and an envelope 10 housing thesecomponents. In the wall of the waveguide 3 are formed a plurality of airholes 8.

The microwave discharge light source apparatus further includes aspherical discharge bulb 6 of quartz glass which has no electrode andwhich has a sufficiently small size so as to make the light emissiveportion thereof approximate a point light source. The bulb 6 is filledwith mercury as a discharge photoemissive substance and argon gas as astarter noble gas and fixedly supported by the light reflecting member4.

The magnetron 1 is cooled by air flow provided by a fan 7 supported byan upper wall of the envelope 10 and the open end of the cup shapedreflection member 4 is covered by a mesh plate 9 which is transparent tolight but opaque to microwaves. The light reflecting member 4 formstogether with the mesh plate 9, a resonance cavity 49 which serves as aresonator when the bulb 6 is lit.

In operation, when electric power is supplied to the magnetron 1, themagnetron 1 radiates microwave energy through the waveguide 3 and thefeeding opening 5 into the microwave cavity 49. However, since thedischarge bulb 6 is not ignited immediately after the start of microwaveoscillation, the cavity 49 is in the non-resonance state and only amicrowave electromagnetic field is established in the cavity 49 due tomicrowaves leaking from the feeding opening 5. Then, the discharge ofthe bulb 6 is started by the electromagnetic field. When the dischargeof the bulb 6 is started, the cavity 49 becomes resonant and a resonanceelectromagnetic field is established therein. Sufficient microwaveenergy to maintain the discharge of the discharge bulb 6 is supplied bythe resonance electromagnetic field.

Therefore, according to the invention, since the microwave cavity 49acts as a resonator, it is possible to inject a sufficient amount ofmicrowave energy into the small spherical discharge bulb so that theefficiency of the device is increased over prior art constructions.Since the shape of the discharge bulb 6 can be considered as a pointsource, it is possible to dispose it at a position within the cavity 49where the variation of microwave electromagnetic field distribution isnegligible. Therefore, unevenness of the discharge in the discharge bulb6 is eliminated as is unevenness of light emission. Furthermore, sincethe light reflecting member 4 has a rotationally symmetrical shape, themanufacture thereof is very easy so that, in determining the shape ofthe cavity 49 serving as a resonator, which is quite difficult to doanalytically, it is easy to select an optimum size by changing the sizethereof experimentally.

If the mesh plate 9 is formed by, for example, etching a thin metalplate of a material such as a stainless steel plate having a thicknessof 0.1 mm, the microwave loss thereof is much smaller than a mesh platemade of metal wire because there is contact between metal portions.Therefore, the microwave energy can be more effectively converted intodischarge energy and thus the light emission efficiency is considerablyimproved.

Further, as shown in FIG. 6, it is possible to form the cavity 49 of thelight reflecting member as a truncated pyramid. With this shape, adesired illumination distribution is obtained within the square area. Inthis case, the microwave electromagnetic field distribution isapproximately in a square mode, while with the rotationally symmetricalcavity, the mode is approximately circular or cylindrical.

EMBODIMENT 2

A second preferred embodiment will be described with reference to FIG. 7in which the same or similar components as those in FIG. 6 are depictedby the same reference numerals. A light control member 11 including alens is disposed below a mesh plate 9 and a cavity 43 is formed by areflecting member 41 having a center of curvature at the point at whichthe discharge bulb 6 is disposed and a wing portion 42 extending fromthe reflection member 41. An inner surface of the wing portion 42 iscoated with graphite or provided with an anti-reflection layer 43 sothat there is substantially no reflection from the inner surface of thewing portion 42. With this structure, in addition to the ease of cavitydesign, all of the light incident on the light control member 11 can beconsidered as emerging from the discharge bulb 6. Thus, it is possibleto control the illumination distribution by suitably setting the lightcollection characteristics of the light control member 11.

The light control member 11 may be of the light scattering type and,regardless to say, it is to be capable of regulating the illuminationdistribution.

Further, this embodiment can be modified as shown in FIG. 8. In FIG. 8,the light reflecting member 4 is rotationally symmetrical and has aperipheral portion inner surface which is provided with the lightabsorption layer 43 which may be a coated layer of a material such asgraphite. The light control member 11 may be fixedly secured by screws21 through an annular mounting plate 20 to the light reflecting member 4with an annular spacer 22. With the modification of FIG. 8, theillumination distribution control of the illuminating area is performedin a similar manner to that in FIG. 7. In addition, since the cavity 49can be formed as a resonance cavity by suitably determining the areawhere the light absorption layer 43 is provided, the ease of design ismuch improved.

EMBODIMENT 3

A third embodiment will be described with reference to FIGS. 9 through11 of which FIG. 9 is a schematic cross-sectional illustration thereof.FIG. 10 is an enlarged view of the cavity portion thereof and FIG. 11 isa further enlarged view of the cavity portion. In these figures, thesame reference numerals used in FIGS. 4 and 5 indicate the same orcorresponding components as those used in FIGS. 4 and 5. Here, theelectrodes discharge bulb 6 of quartz in the shape of a sphere is formedwith a pair of quartz protrusions 61 extending from an outer surface 62thereof oppositely. As before, the bulb 6 is filled with mercury andargon gas. The bulb 6 is further formed with a quartz tube 63 extendingfrom the outer surface 62 thereof in which a start assisting member 64in the form of a tantalum wire is encapsulated.

A mesh plate 9 which is transparent to light but opaque to microwave isfixed by bolts 15 between a flange portion 16 of the light reflectingmember 4 formed by bending the peripheral edge thereof and an annularpress plate 17 corresponding in shape to the flange portion 16 whichcovers the open end of the light reflecting member 4 to thereby definethe microwave cavity 49.

Free ends of the protrusion 61 of the bulb 6 are inserted into innerends of supporter cylinder 12 which is made of quartz. The outer ends ofthe supporter cylinder 12 are inserted into cut-off sleeves 13 formed onthe outer surface of the light reflecting member 4 and supported therebyby stopper screws 14, respectively. The position of the bulb 6 supportedin this way is determined such that when the bulb 6 is energized thecavity 49 becomes a resonator.

This arrangement can provide not only the same effects as provided bythe first embodiment but also an effect that, due to the provision ofthe start assisting member 64, the intensity of the electromagneticfield around the opposite ends of the start assisting member 64 is quitehigh, as indicated by E in FIG. 11, and thus the electromagnetic fieldstrength within the bulb 6 is higher than the discharge startingelectromagnetic field strength even when the electromagnetic fieldstrength within the cavity 49 immediately before the discharge startingof the bulb 6 is low thus assuring the ignition of the bulb 6 withoutincreasing the microwave input energy. Further, the bulb 6 is easilydetachable and positioning of the bulb 6 can be easily performed bymerely adjusting the position of the supporting cylinder 12.

Furthermore, since the start assisting member 64 is embedded in theexhausted tube 63 of dielectric material such as quartz and thebreakdown voltage of the dielectric material in a vacuum is much higherthan in air, the possibility of discharge outside of the bulb 6 is suchreduced and the possibility of melting the starting assisting member 64is eliminated. The electromagnetic field distribution within the cavity49 prior to the ignition of the bulb 6, i.e., in the state whereimpedance matching is not yet established, is most dense the near thefeeding opening 5. Therefore, if the start assisting member 63 ispositioned such that one end thereof is in the vicinity of the feedingopening 5, it is possible to further strengthen the electromagneticfield within the bulb 6 to thereby cause the discharge starting to beaccomplished easier.

Further, since the impedance of the start assisting member 64 duringstable discharge of the bulb 6 is negligible compared with the impedanceof the bulb 6 itself, the existence of the start assisting member doesnot affect the stability of the operation of the bulb 6.

The length l of the cut-off sleeve 13 should be determined such that theleakage of microwaves from the cavity resonator is restricted to be ator below a level (1 mW/cm²) at which there is no safety problem. Thepower density (P) of leaked microwaves can be expressed by the followingequation: ##EQU1## where, ##EQU2## where λ is the free space wavelengthof the microwaves in centimeters, P_(o) is microwave input energy inwatts, a is the inner diameter of the cut-off sleeve 13 is centimetersand E_(r) is the specific dielectric constant of the supporting member.

Therefore, in order to make the leakage power P equal to or smaller than1 mW/cm², the length l must be equal to or longer than: ##EQU3##

As a typical example, when P_(o) =1 kW, a=0.4 cm, λ=12.24 cm and E_(r)32 4, the length l should be 1.6 cm or longer.

In the embodiment shown in FIGS. 9 through 10, the start assistingmember 64 is embedded in the cylinder member 63 which protrudes from theouter surface of the discharge bulb 6. Alternatively, it may be houseddirectly in the discharge bulb 6 as shown in FIG. 12 or it may becovered by a dielectric material such as quartz to provide a reducedpressure atmosphere therefor so that the member 64 does not react withother materials filling the bulb 6 and then be housed in the bulb 6 asshown in FIG. 13. Alternatively, a pair of start assisting members 64may be used for this purpose as shown in FIG. 14. In FIG. 14, a pair ofstart assisting members 64 are encapsulated and coupled in series by acommon evacuated tube member 63 made of a dielectric material withopposing ends of the members 64 being slightly separated so that theelectromagnetic field intensity is high around the space therebetweenand the tube member 63 housed in the bulb 6.

FIG. 15 shows a modification of the discharge bulb 6 in which thesupporting thereof is somewhat simplified. In FIG. 15, the cylindermember 63 in which the start assisting member 64 is positioned is usedas a supporting portion thereof which is held by a correspondingsupporting member provided around the feeding opening 5 of the lightreflecting member 4. To this effect, a thread 65 is formed on the outersurface of the cylinder member 63 and a bulb support member 66 of thelow loss dielectric material such as quartz glass having one endsuitably fixed to the light reflecting member 4 and the other endthreaded correspondingly to the thread 65 of the cylinder member 63 isprovided. The discharge bulb 6 is fixedly supported by screwing thecylinder member 63 into the thread of the bulb supporting member 66. Inthis case, there is no need of providing the protrusions 61 and thecut-off sleeves 13 and therefore the manufacture of the device isconsidered quite simple.

EMBODIMENT 4-1

In accordance with a fourth embodiment, in addition to mercury used inthe preceding embodiments, gallium is provided as a light emittingsubstance so that emitted light includes waves of the gallium atomspectrum of 403 nm and 417 nm as well as the mercury atom spectrum of365 nm, 405 nm and 436 nm. The purpose of this embodiment is to make theapparatus of the present invention also applicable to an exposing lightsource for a diazo type photosensitive material which is sensitive towavelengths of 403 nm and 417 nm. The discharge bulb 6 and the lightreflecting member 4 used in this embodiment can be any of those of thepreceding embodiments.

An actual device was assembled using the construction shown in FIGS. 4and 5 with microwave output power of the magnetron 1 being 700 W andwith the inner surface of the light reflecting 4 being completelycovered by carbon black so as to eliminate the effects of reflectionfrom the light reflecting member so that measurement could be made ofonly the direct light from the bulb 6. The materials filling the bulb 6were mercury, gallium and iodine as a halogen. A light output havingwavelengths from 350 nm to 450 nm was measured for bulbs containingvarious amounts of these materials.

FIG. 16 shows a plot of relative light output on the ordinate forwavelengths from 350 nm to 450 nm with respect to the amount of mercuryencapsulated in the bulb 6 on the abscissa. Here, the inner diameter ofthe spherical discharge bulb 6 was 30 mm and the bulb 6 also containedargon gas at 60 mm Hg, 1 mg of gallium, 4 mg of mercury iodide and avariable amount of mercury. As will be clear from FIG. 16, when theamount of mercury is increased with the amounts of gallium and mercuryiodide held constant, the light output reaches a maximum when the amountof mercury is about 100 mg. The arc is stable up to mercury amounts ofabout 150 mg and then the light emission becomes unstable with largeramounts. This may be considered due to the fact that when the amount ofmercury is increased beyond 150 mg, the mercury vapor pressure in thedischarge bulb 6 becomes saturated and the excess amount of mercury isdeposited on the inner wall of the discharge bulb 6. This phenomenon canalso be observed when the amount of mercury is varied with the amountsof gallium and mercury iodine being other constant values.

EMBODIMENT 4-2

FIG. 17 shows a plot of relative optical output of the discharge bulb 6in a wavelength range from 350 nm to 450 nm with the amount of mercuryiodide on the abscissa for a case where the spherical bulb 6 has aninner diameter of 30 mm and contains argon gas at 60 mmHg, 60 mg ofmercury, 0.5 mg of gallium and various amounts of mercury iodide. As isclear from FIG. 17, the light output of the bulb 6 increasessubstantially with increased amounts of mercury iodide reaching amaximum when the amount of mercury iodide is about 2 mg, i.e., when theatom ratio of gallium to iodide is around 1:1.2. With a further increasein the amount of mercury iodide, the output decreases gradually. Thistendency can also be observed when the amount of mercury iodide isvaried while the amounts of mercury and gallium are other constantvalues. It has been observed that the maximum light output is obtainedwhen the gallium to mercury iodide ratio is 1:4, i.e., for a galliumatom to iodide atom ratio of about 1:1.2.

EMBODIMENT 4-3

FIG. 18 shows plots of relative light outputs in a wavelength range from350 nm to 450 nm of three spherical discharge bulbs 6 which have aninner diameter of 30 mm and which contain argon gas at 60 mmHg and avariable amount of a mixture of gallium and mercury iodide with fixedratio of 1:4 together with mercury in amounts of 60 mg, 80 mg and 150mg. As is clear from FIG. 18, regardless of the amount of mercury, thelight output increases with an increased amount of the mixture andbecomes a maximum with the amount of gallium at about 0.5 mg to about2.0 mg and then decreases with a further increase of gallium. When theamount of gallium is increased beyond 2.5 mg, i.e., when the amount ofmercury iodide is greater than 10 mg, the arc becomes astable even whenthere is no residual mercury. This may be considered as due to the factthat iodine in the arc affects the latter adversely. This is confirmedby the fact that when only the amount of gallium is increased with theamount of mercury iodide restricted to be 10 mg or less, there is noturbulence of the arc while gallium is deposited on a portion of theinner wall of the bulb in operation.

It will be clear from a consideration of Embodiments 4-1 through 4-3that in order to obtain an intense light output in a wavelength range offrom 350 nm to 450 nm by using microwave excitation, a non-electrodedischarge light source having a spherical discharge bulb having an innerdiameter of 30 mm with amounts of mercury, gallium and mercury iodideencapsulated in the bulb of 20 mg to 170 mg, 1510 mg, 0.1 mg or more and0.5 mg to 15 mg, respectively, should be used. These values can berepresented in gram atomic weight per unit inner volume of the bulb as7×10⁻⁶ -60×10⁻⁶, 1×10⁻⁷ or more and 1.5×10⁻⁷ to 50×10⁻⁷, respectively.In this case, mercury iodide includes mercury of 0.75×10⁻⁷ to 25×10⁻⁷gram atomic weight/cc. However, since the amount of mercury contained inthe mercury iodide is very small in comparison with the required amountof mercury, that amount may be considered negligible. It should be notedagain that, with these substances except for gallium, with less than thespecified values, it is impossible to obtain a required light output andin, the specified wavelength range with these substances, except forgallium if greater quantities are used, the light output decreases andthe arc becomes astable. As to the amount of gallium, since it does notbecome halogenized gallium and the saturating vapor pressure of metalgallium at the temperature of the inner wall of the operating bulb islow, metal gallium which is not converted into gallium iodide isdeposited on the bulb inner wall. However, since this metal gallium doesnot affect the arc adversely, there is no need of defining of an upperlimit on the amount thereof.

Although the above Embodiments 4-1 to 4-3 relate specifically to aspherical bulb having an inner diameter of 30 mm, substantially the sameresults can be obtained by using a bulb having an inner diameter of 20mm to 50 mm. However, with a bulb having an inner diameter smaller than20 mm and for a microwave input of 700 W, the bulb tends to break withina short time due to the high temperature even if the amount of coolingair is increased. On the contrary, with a bulb having an inner diameterlarger than 55 mm, the temperature of the bulb wall will be too cooleven if the cooling air supply is stopped and thus it is impossible toobtain the necessary vapor pressures of the substances encapsulated inthe bulb in operation resulting in a reduced light output. Therefore, inorder to obtain a required light output within the desired wavelengthrange, it is preferable to select the surface area of the bulb per unitmicrowave input within the range from 1.5 mm² /W to 15 mm² /W. Thisrange is also preferable for Embodiments 1 to 3 in which only mercury isused as the discharge emissive substance.

EMBODIMENT 4--4

FIG. 19 shows plots of time required to stabilize the light emission ofspherical bulbs 6 having an inner diameter of 30 mm for different wallthicknesses, and hence total bulb weights, for bulbs containing argon at60 mmHg, 80 mg of mercury, 1 mg/gallium, and 4 mg of mercury iodide. Thegraph of FIG. 19 also contains similar plots of the time required tostabilize the light emission of bulbs having inner diameters of 25 mmand 40 mm, respectively, with each bulb containing suitable amounts ofargon, mercury, gallium and mercury iodide in the same ratio as the 30mm diameter bulb to estabilish the same physical and chemical conditionswithin the bulbs for comparison purposes. In this embodiment, thestabilizing time required to stabilize the light output is defined asthe time until the light output reaches 80% of the light output afterthe bulb is completely stabilized.

As is clear from FIG. 19, the stabilizing time increases substantiallylinearly with increases of bulb weight beyond about 4 g, while forweights of less than 4 g, the effect of shortening the stabilizing timeis not substantial.

With a bulb weight greater than 20 g, the stabilizing time becomeslonger than 1 minute and thus the merit of a microwave discharge lightsource apparatus having a short stabilizing time disappears. It shouldbe noted that the data shown in FIG. 19 was obtained by a magnetronhaving a microwave output of 700 W. Since the stabilizing time dependsmainly upon the correlation between the microwave output and the thermalcapacity of the transparent quartz glass forming the outer wall of thebulb, a larger the microwave input to the bulb results in a shorterstabilizing time which is proportional to the thermal capacity of thequartz glass forming the outer wall of the bulb 6. Therefore, in orderto restrict the stabilizing time within desirable limits, the weight ofthe bulb 6 for a given microwave input thereto should be set withinpredetermined limits. For example, a stabilizing time shorter than 1minute can be obtained with a bulb 6 having a weight of about 3.0×10⁻²g/W or lighter. This is also applicable to Embodiments 1-3 which arebulbs containing only mercury as emission substance.

EMBODIMENT 5

A specific circuit of a power source for the magnetron 1 used in theEmbodiments 1 to 4 will now be described with reference to FIG. 20.

In FIG. 20, a transformer T has a primary winding 1P connected across anA-C supply E and a secondary winding 1S is connected in parallel with aseries circuit of a capacitor C₁₁ and a diode D₁₁. A series circuit of acapacitor C₁₂ and a diode D₁₂ is connected in parallel with the seriesconnection of the capacitor C₁₁ and diode D₁₁. The capacitors C₁₁ andC₁₂ and diodes D₁₁ and D₁₂ form a full wave voltage doubler rectifierwhose output voltage is applied to an anode of the magnetron 1. Thetransformer T has a further secondary winding 2S having terminalsconnected to a cathode of the magnetron 1.

By using the full-wave voltage doubler rectifier circuit shown in FIG.20, it is possible to restrict the rest period of microwaves to 5 msecor shorter economically. Further, if a leakage transformer is used asthe transformer T, a microwave output having a waveform shown in FIG. 21can be obtained. In FIG. 21, a time period 181 is a microwave generatingperiod and a time period 191 is the microwave rest period. When thisrest period 191 is on the order of 1 msec, the ionized gas does notextinguish so that a discharge can be restarted immediately thereafter.Thus, there is no termination of discharge so long as the rest period issufficiently short.

Since with the circuit of FIG. 20 the rest period can be made 5 msec orshorter by using a full-wave voltage doubler rectifier and a leakagetransformer for applying the anode voltage to the diode of the magnetron1, there is no termination of discharge caused by a longer rest period.This is another important effect of the present invention in comparisonwith a conventional power source for a magnetron 1 using a half-wavevoltage doubler rectifier in which the rest period is usually 8 to 10msec and for which there is a disadvantage that the discharge may stopafter a period of several to several tens of seconds after dischargeinitiation depending on the types of metals encapsulated in thedischarge bulb 6. This phenomenon of the conventional power supply canbe considered to be due to the fact that since the metals encapsulatedin the bulb are vaporized and the metal gas atom density in the bulbafter the discharge commences is high so that the amount of energyderived from the microwave energy injected into the bulb beforecollision of electrons with atoms is small, the ionization probabilityis lowered below a level necessary to maintain the discharge. Further,the prior art power supply used to drive the magnetron to thereby causeit generate microwaves continuously is expensive. As to the microwavegenerator itself, there is a disadvantage that if it first generatesmicrowaves continuously and then the operation thereof is shifted to thesink region, it is very difficult to recover the normal operation. Thereis no such defect in the apparatus of the invention.

Although the circuit of FIG. 20 has been described as being used with asingle magnetron 1, it is possible to use a pair of magnetrons for thispurpose. In such a case, the magnetrons may be driven by power supplieshaving half-wave voltage doubler rectifies shifted in phase by 180° withrespect to each other.

EMBODIMENT 6

In the microwave discharge light source apparatus of any of Embodiments1 to 4, it is advantageous to further shorten the stabilizing time fromthe discharge initiation of the discharge bulb 6 through the metal gasdischarge to the stabilized discharge state. The stabilizing timedepends upon the evaporation rate of the metal encapsulated in the bulb6 and that rate, in turn, depends upon the rate of temperature increaseof the inner wall of the bulb 6. An increase of the temperature increaserate can be brought about by a larger discharge energy, i.e., microwaveenergy.

In view of these facts, as well as the operational characteristics ofthe magnetrons, it has been found that a shortening of the stabilizingtime can be achieved by suitably selecting the length of the waveguide3.

In general, the operation of the magnetron can be represented by a Riekediagram on an impedance chart as shown in FIG. 22. In FIG. 22, thedistance from the center of the chart and the angular positionrespectively represent the microwave reflection coefficient σ and thephase. Lines A to F are equi-output power lines of the oscillationoutput of the magnetron with the line A corresponding to the highestoutput power line and with the output gradually decreasing toward theline F. σ indicates the sink region of the magnetron where theoscillation thereof becomes abnormal.

FIG. 23 shows an example of the impedance of the cavity 4 after thedischarge bulb 6 is ignited. The impedance of the cavity immediatelyafter the bulb is ignited is indicated by a point LA. After theignition, the impedance of the cavity 4 varies with variations of thedischarge state due to vaporization of the metals in the bulb becomingconstant in the stable state. By matching the impedance, i.e.,regulating the resonance frequency of the cavity and the dimensions ofthe feeding opening such that the characteristic impedance is at thecenter of the impedance chart, the impedance varies from the point LAthrough L to the center of the chart.

As mentioned above, the output power of the magnetron 1 is largest atthe side of the sink region. Therefore, by making the load impedance(here, the cavity impedance) seen from the magnetron 2 larger at thesink side, a greater amount of microwave energy can be provided. Whenthe waveguide 3 is connected to the cavity 4, the impedance seen fromthe free end of the waveguide 3 becomes equal to the cavity impedancerotated around the center of the impedance chart by an anglecorresponding to the length of the waveguide 3. Therefore, in order toposition the line L₁ in FIG. 23 at the sink side in FIG. 22 by rotation,a line L₂ may be obtained by rotating the line L₁ by, for example, 0.25λg, where λg is the wavelength of the waveguide 3. That is, the lengthof the waveguide 3 may be 0.25 λg. As is clear from FIG. 23, the sameeffect can be obtained by selecting the length of the waveguide to be0.25 λg+n×0.5 λg where n is an integer because 0.5 λg corresponds to onecomplete rotation of the line L₁.

Accordingly, in this example, by varying the length of the waveguide 3between the cavity 4 and the magnetron 1, the load impedance for themagnetron 1 varies along the line L₂ so that the magnetron output powerfollows the lines A-B shown in FIG. 22 resulting in a larger outputpower. Therefore, the stabilizing time can be shortened.

The above description relates to the case where the cavity impedance ismoved from the point LA along the line L₁. However, the same is alsoapplicable to other impedance conditions of the cavity which may dependon the shape of the cavity, the position of the discharge bulb thereinand the content of the bulb, etc. In any case, the length of thewaveguide is to be selected so as to meet these conditions. It should benoted that, generally, the magnetron output is large where the operatingpoint thereof is at a position within a quarter wavelength phase widthof the waveguide on the sink side and therefore the length of thewaveguide can be determined by the latter condition.

In the microwave generated plasma light source apparatus described withreference to Embodiments 1 to 6, it is possible to use a small dischargebulb 6 and thus the microwave power per unit surface area of the bulb 6can be made large even if the microwave power supplied thereto isrelatively small resulting in a high light emission efficiency. Forexample, a magnetron having a small output, such as magnetron used foran electronic cooking range for home use, may be utilized for thispurpose.

As mentioned hereinbefore, the microwave generated plasma light sourceapparatus according to the present invention includes a microwavegenerator, a microwave cavity serving as a resonance cavity having alight reflecting member and a member transparent to light and but opaqueto microwaves, a waveguide for guiding microwave generated by themicrowave generator to a feeding opening of the cavity, and a smallnon-electrode discharge bulb which is disposed in a position in thecavity such that the cavity operates as a resonant cavity at least whenthe bulb is lit with the bulb being sufficiently small that it can beapproximated as a point light source and discharge light emissivesubstances therein are encapsulated therein. With this construction, itis possible to supply microwaves to the bulb efficiently, the opticaldesign is facilitated and a illumination distribution in achieved oranother desired illumination distribution can be provided.

Particularly, if gallium is added as the discharge emissive substance tothe discharge bulb, the light emission characteristics of the lightsource apparatus are suitable for use in a photographic plate makingwhich requires a highly uniform illumination distribution in a specificarea.

The light source apparatus of the invention can be used also as a lightsource such as a spotlight source, which requires a small light sourceof high output, by modifying the shape of the light reflecting memberconstituting the microwave resonance cavity.

What is claimed is:
 1. A microwave generated plasma light sourceapparatus comprising: a microwave generator; a microwave cavity having alight reflecting member forming at least a portion of said cavity, saidmicrowave generator being coupled through a feeding opening in saidcavity to said cavity; a member transparent to light and opaque tomicrowaves disposed across an opening of said cavity opposite saidfeeding opening; a waveguide for guiding microwaves generated by saidmicrowave generator to said feeding opening of said cavity; and anelectrodeless discharge bulb disposed at a position in said cavity suchthat said cavity operates as a resonant cavity at least when said bulbis emitting light, said bulb encapsulating at least one discharge lightemissive substance and having a shape and being sufficiently small thatsaid bulb functions substantially as a point light source, said bulbbeing made of transparent quartz glass and having an inner diameter suchthat a ratio of an outer surface area of said bulb to the microwaveinput power is from 1.5 mm² /W to 15 mm² /W, the weight of said bulbwith respect to the microwave input power being no more than 3.0×10⁻²g/W, said microwave generator comprising means for generating microwavesintermittently with a rest interval of no more than 5 msec.
 2. Themicrowave generated plasma light source apparatus as claimed in claim 1wherein said light reflecting member comprises a light reflecting shellhaving rotational symmetry.
 3. The microwave generated plasma lightsource apparatus as claimed in claim 1 wherein said light reflectingmember comprises a center reflecting shell having at least a portionthereof of the same shape as said bulb and having a wing portionextending from a peripheral edge of said center reflecting shell, aninner surface of said wing portion being non-reflective to light.
 4. Themicrowave generated plasma light source apparatus as claimed in claim 1further comprising lens means for one of collecting and scattering lightpassing through said member transparent to light and opaque tomicrowaves.
 5. The microwave generated plasma light source apparatus asclaimed in claim 1 wherein said non-electrode discharge bulb comprisesan electrically conductive discharge start assisting member disposed atleast in the vicinity of said bulb for concentrating a magnetic field.6. The microwave generated plasma light source apparatus as claimed inclaim 5 wherein said electrically conductive discharge start assistingmember is encapsulated in said bulb.
 7. The microwave generated plasmalight source apparatus as claimed in claim 5 wherein said dischargestart assisting member is disposed on a side of said bulb facing saidfeeding opening.
 8. The microwave generated plasma light sourceapparatus as claimed in claim 5 wherein said discharge start assistingmember is in the shape of wire.
 9. The microwave generated plasma lightsource apparatus as claimed in claim 5 wherein said start assistingmember comprises an electrically conductive member and a dielectriccover covering said electrically conductive member.
 10. The microwavegenerated plasma light source apparatus as claimed in claim 9 wherein aspace is provided between said conductive member and said dielectriccover, said space being at a reduced pressure.
 11. The microwavegenerated plasma light source apparatus as claimed in claim 1 whereinsaid light reflecting member is formed with a pair of opposed cutoffsleeves into which a pair of supporting members of said bulb areinserted to support said bulb.
 12. The microwave generated plasma lightsource apparatus as claimed in claim 11 wherein said bulb has saidsupporting members integrally formed therewith.
 13. The microwavegenerated plasma light source apparatus as claimed in claim 1 whereinsaid discharge light emissive substance encapsulated in said bulbcomprises mercury of 7×10⁻⁶ gram atom/cc to 60×10⁻⁶ gram atom/cc,gallium of at least 1×10⁻⁷ gram atom/cc and halogen of 1.5×10⁻⁷ to50×10⁻⁷ gram atom/cc.
 14. The microwave generated plasma light sourceapparatus as claimed in claim 1 wherein said microwave generatorcomprises a magnetron and full-wave voltage doubler power supply meansfor driving said magnetron.
 15. The microwave generated plasma lightsource apparatus as claimed in claim 1 wherein the length of saidwaveguide is selected such that the operation of said magnetron iswithin a phase width of a quarter wavelength with respect to a sinkregion immediately after said bulb is ignited. .Iadd.
 16. A microwavegenerated plasma light source apparatus comprising: a microwavegenerator; a microwave cavity having a light reflecting member formingat least a portion of said cavity, said microwave generator beingcoupled through a feeding opening in said cavity to said cavity; amember transparent to light and opaque to microwaves disposed across anopening of said cavity; a waveguide for guiding microwaves generated bysaid microwave generator to said feeding opening of said cavity; and anelectrodeless discharge bulb disposed at a position in said cavity suchthat said cavity operates as a resonant cavity at least when said bulbis emitting light, said bulb encapsulating at least one discharge lightemissive substance and having a substantially spherical shape and beingsufficiently small that said bulb functions substantially as a pointlight source, said bulb being made of transparent quartz glass andhaving an inner diameter such that a ratio of an outer surface area ofsaid bulb to the microwave input power is not more than 15 mm² /W, theweight of said bulb with respect to the microwave input power being nomore than 3.0×10⁻² g/W, said microwave generator comprising means forgenerating microwaves intermittently with a rest interval of no morethan 5 msec..Iaddend. .Iadd.
 17. The microwave generated plasma lightsource apparatus as claimed in claim 16 wherein said light reflectingmember comprises a light reflecting shell having rotationalsymmetry..Iaddend. .Iadd.18. The microwave generated plasma light sourceapparatus as claimed in claim 16 wherein said light reflecting membercomprises a center reflecting shell having at least a portion thereof ofthe same shape as said bulb and having a wing portion extending from aperipheral edge of said center reflecting shell, an inner surface ofsaid wing portion being non-reflective to light..Iaddend. .Iadd.19. Themicrowave generated plasma light source apparatus as claimed in claim 16further comprising lens means for one of collecting and scattering lightpassing through said member transparent to light and opaque tomicrowave..Iaddend. .Iadd.20. The microwave generated plasma lightsource apparatus as claimed in claim 16 wherein said electrodelessdischarge bulb comprises an electrically conductive discharge startassisting member disposed at least in the vicinity of said bulb forconcentrating a magnetic field..Iaddend. .Iadd.21. The microwavegenerated plasma light source apparatus as claimed in claim 20 whereinsaid electrically conductive discharge start assisting member isencapsulated in said bulb..Iaddend. .Iadd.22. The microwave generatedplasma light source apparatus as claimed in claim 20 wherein saiddischarge start assisting member is disposed on a side of said bulbfacing said feeding opening..Iaddend. .Iadd.23. The microwave generatedplasma light source apparatus as claimed in claim 20 wherein saiddischarge start assisting member is in the shape of wire..Iaddend..Iadd.24. The microwave generated plasma light source apparatus asclaimed in claim 20 wherein said start assisting member comprises anelectrically conductive member and a dielectric cover covering saidelectrically conductive member..Iaddend. .Iadd.25. The microwavegenerated plasma light source apparatus as claimed in claim 24 wherein aspace is provided between said conductive member and said dielectriccover, said space being at a reduced pressure..Iaddend. .Iadd.26. Themicrowave generated plasma light source apparatus as claimed in claim 16wherein said light reflecting member is formed with a pair of opposedcutoff sleeves into which a pair of supporting members of said bulb areinserted to support said bulb..Iaddend. .Iadd.27. The microwavegenerated plasma light source apparatus as claimed in claim 26 whereinsaid bulb has said supporting members integrally formedtherewith..Iaddend. .Iadd.28. The microwave generated plasma lightsource apparatus as claimed in claim 16 wherein said discharge lightemissive substance encapsulated in said bulb comprises mercury of 7×10⁻⁶gram atom/cc to 60×10⁻⁶ gram atom/cc, gallium of at least 1×10⁻⁷ gramatom/cc and halogen of 1.5×10⁻⁷ to 50×10⁻⁷ gram atom/cc and halogen of1.5×10⁻⁷ to 50×10⁻⁷ gram atom/cc..Iaddend. .Iadd.29. The microwavegenerated plasma light source apparatus as claimed in claim 16 whereinsaid microwave generator comprises a magnetron and full-wave voltagedoubler power supply means for driving said magnetron..Iaddend..Iadd.30. The microwave generated plasma light source apparatus asclaimed in claim 16 wherein the length of said waveguide is selectedsuch that the operation of said magnetron is within a phase width of aquarter wavelength with respect to a sink region immediately after saidbulb is ignited..Iaddend. .Iadd.31. The microwave generated plasma lightsource apparatus as claimed in claim 16 wherein said microwave cavityhas a rotationally symmetrical shape..Iaddend. .Iadd.32. The microwavegenerated plasma light source apparatus as claimed in the claim 16wherein said microwave cavity has at least one spherical surface portionwhose center is common to the center of said bulb..Iaddend. .Iadd.33.The microwave generated plasma light source apparatus as claimed inclaim 32 further comprising lens means disposed before said lighttransparent member..Iaddend. .Iadd.34. The microwave generated plasmalight source apparatus as claimed in claim 16 wherein said opening ofsaid cavity across which said member transparent to light and opaque tomicrowaves is disposed is located opposite to said feedingopening..Iaddend.